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Evaporation Source Selection Guide

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Evaporation Source Type

Process Conditions

Rev.

11/13/2008

Low Power
<100amps

Med. Power 100-250 amps

High Power
>250 amps

Low Temp Materials
<1,000°C

High Temp Materials
> 1,000°C

Corrosive Materials

Low Volume Coating
<1,000A°

Medium Volume 1,000A° - 5,000A°

High Volume Coating
>5,000A°

Reduce Particulates from Spitting

Tungsten Filament

 

 

 

 

 

 

Tungsten Point Source

 

 

 

 

 

 

Tungsten Basket

 

 

 

 

 

 

Alumina Coated Basket

 

 

 

 

Tungsten Basket Heater

 

 

 

 

 

 

Shielded Crucible Heater

 

 

 

Evaporation Boat

 

 

 

Folded Boat

 

 

Alumina Coated Boat

 

 

 

Baffled Box Sources

 

 

 

Shielded Baffled Box Sources

 

 

 

Micro-Electronic Sources

 

 

 

 

 

 

Chrome Plated Tungsten Rods

 

 

 

 

 

© Copyright R. D. Mathis Company

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

This source selection guide is provided to help you determine which evaporation source type might fit you needs the best.

 

 

How to use the Guide:

 

 

1) Determine how much current your system power supply is capable of safely producing.

 

 

2) Establish the vapor temperature of the material(s) you plan on evaporating.

 

 

3) Estimate the coating thickness you will be attempting. With the information shown above, you can select which part types will best meet your needs.

 

 

The actual power required for each part number can be found on our website by clicking on the part number. As always, the R. D. Mathis company offers no charge technical support if you need further assistance in choosing the right evaporation source to make your thin film coating process a success.

 

 

 

 

 

 

 

 

 

 

 

© Duplication, reproduction or copying of the information contained in this selection guide is not permitted without the express written consent of the R. D. Mathis Company.

 

 

 

 

 

 

 
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Your best choice for quality hi-vacuum evaporation sources.
R.D. Mathis Company
Call Us:
P.O BOX 92916, Long Beach, Ca  90809-2916 Telephone (562) 426-7049 Fax (562) 595-0907